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Ep2630281b1.pdf

Catalyst Diffusion

The Catalyst Diffusion family is covering a method for manufacturing a plurality of nanostructures on a substrate.

The inven­tion: Nano­struc­ture device and meth­od for man­u­fac­tur­ing nano­struc­tures – A meth­od for man­u­fac­tur­ing a plur­al­ity of nano­struc­tures on a sub­strate. The meth­od com­prises the steps of: depos­it­ing a bot­tom lay­er on an upper sur­face of the sub­strate, the bot­tom lay­er com­pris­ing grains hav­ing a first aver­age grain size; depos­it­ing a cata­lyst lay­er on an upper sur­face of the bot­tom lay­er, the cata­lyst lay­er com­pris­ing grains hav­ing a second aver­age grain size dif­fer­ent from the first aver­age grain size, thereby form­ing a stack of lay­ers com­pris­ing the bot­tom lay­er and the cata­lyst lay­er; heat­ing the stack of lay­ers to a tem­per­at­ure where nano­struc­tures can form; and provid­ing a gas com­pris­ing a react­ant such that the react­ant comes into con­tact with the cata­lyst layer.

Granted patents relating to the innovation

Pat­ent OfficePat­ent
ChinaCN103154340
EuropeEP2630281
IndiaIN347659
Rus­siaRU2573474
South KoreaKR101736303
South KoreaKR101903714
South KoreaKR101970209
USAUS9206532
For more inform­a­tion about a par­tic­u­lar pat­ent, click on its name to view it on Google Patents.

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