Electrical Performance and Robustness of Ultrathin High-Density Carbon Nanofiber Capacitors on Silicon, Alumina and Glass Substrate Materials

We demon­strate the feas­ib­il­ity of imple­ment­ing car­bon nano fiber based met­al-insu­lat­or-met­al (CNFMIM) capa­cit­ors on dif­fer­ent sub­strates such as glass, alu­mina and sil­ic­on for use as integ­rated or dis­crete pass­ive com­pon­ents on chips or inter­posers. The effects of bias­ing voltage and high oper­at­ing tem­per­at­ures on the per­form­ance of the devices are also invest­ig­ated. Capa­cit­ance dens­it­ies of 300 nF/​mm2 are demon­strated on all sub­strates at a device thick­ness of only 5 μm. The man­u­fac­tured capa­cit­ors fea­ture ESR val­ues at or below 100 mΩ, ESL below 15 pH and show little change in capa­cit­ance dens­ity when sub­jec­ted to bias­ing voltage below break­down and tem­per­at­ures up to 150°C, mak­ing them a prom­ising can­did­ate for both integ­rated and dis­crete mini­atur­ized elec­tron­ic com­pon­ents for future technology.

The paper was presen­ted by Vic­tor Marknäs, Smol­tek AB, Gothen­burg, Sweden at the 53rd Inter­na­tion­al Sym­posi­um on Micro­elec­tron­ics, IMAPS 2020, Octo­ber 5–8, 2020. Due to cov­id-19 this was a vir­tu­al sym­posi­um. Presen­ted by Vic­tor Marknäs, with hon­ors. Present­a­tion awar­ded the ‘Best of Ses­sion Paper’.