Electrical Performance and Robustness of Ultrathin High-Density Carbon Nanofiber Capacitors on Silicon, Alumina and Glass Substrate Materials

We demon­strate the fea­si­bil­i­ty of imple­ment­ing car­bon nano fiber based met­al-insu­la­tor-met­al (CNFMIM) capac­i­tors on dif­fer­ent sub­strates such as glass, alu­mi­na and sil­i­con for use as inte­grat­ed or dis­crete pas­sive com­po­nents on chips or inter­posers. The effects of bias­ing volt­age and high oper­at­ing tem­per­a­tures on the per­for­mance of the devices are also inves­ti­gat­ed. Capac­i­tance den­si­ties of 300 nF/​mm2 are demon­strat­ed on all sub­strates at a device thick­ness of only 5 μm. The man­u­fac­tured capac­i­tors fea­ture ESR val­ues at or below 100 mΩ, ESL below 15 pH and show lit­tle change in capac­i­tance den­si­ty when sub­ject­ed to bias­ing volt­age below break­down and tem­per­a­tures up to 150°C, mak­ing them a promis­ing can­di­date for both inte­grat­ed and dis­crete minia­tur­ized elec­tron­ic com­po­nents for future technology.

The paper was pre­sent­ed by Vic­tor Marknäs, Smoltek AB, Gothen­burg, Swe­den at the 53rd Inter­na­tion­al Sym­po­sium on Micro­elec­tron­ics, IMAPS 2020, Octo­ber 5–8, 2020. Due to covid-19 this was a vir­tu­al sym­po­sium. Pre­sent­ed by Vic­tor Marknäs, with hon­ors. Pre­sen­ta­tion award­ed the ‘Best of Ses­sion Paper’.